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Browsing by Author "Costina, I."

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    Atomically controlled processing for Si and Ge CVD epitaxial growth

    Murota, Junichi
    ;
    Yamamoto, Yuchi
    ;
    Costina, I.
    ;
    Tillack, Bernd
    ;
    Le Thanh, Vin
    ;
    Loo, Roger  
    Meeting abstract
    2016, 229th ECS Meeting: Symposium D01: Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufacturing, 29/05/2016, p.988

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