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    Scale-up of a chemo-epitaxy flow for feature multiplication using directed self-assembly of block-copolymers

    Rincon Delgadillo, Paulina  
    ;
    Craig, Gordon
    ;
    Gronheid, Roel  
    ;
    Nealey, Paul
    Journal article
    2013, Journal of Photopolymer Science and Technology, (26) 6, p.831-839

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