Browsing by Author "Dalmer, Michael"
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Publication Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performance
Journal article2009, Solid State Phenomena, 145-146, p.31-34Publication Removal of nano-particles by aerosol spray: effect of droplet size and velocity on cleaning performance
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS