Browsing by Author "Daniels, Stephen"
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Publication Al speed fill
Journal article1999, Materials Science in Semiconductor Processing, (2) 1, p.75-78Publication IMP liners for Al via speed fill
Proceedings paper1999, Advanced Metallization Conference in 1998- AMC 1998, 6/10/1998, p.433-435Publication IMP liners for all speed fill
Oral presentation1998, Advanced Metallization Conference; 6-8 Oct. 1998; Colorado Springs, USA.Publication Oxygen chemiluminescence in a He plasma as a method for plasma damage evaluation of low-k dielectrics