Browsing by Author "Danila, A."
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Publication Maskless fabrication of high density silicon nan-pin structures with carbon nano clusters acting as mask for subsequent microwave silicon etching
;Yanovich, S. ;Baklanov, Mikhaïl ;Gushchin, O. ;Gornev, E.Danila, A.Meeting abstract2012, Plasma Etch and Strip in Microelectronics - PESM, 15/03/2012