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Browsing by Author "Danila, Andrey"

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    TaN etch mechanisms in BCl3-based plasmas

    Shamiryan, Denis
    ;
    Danila, Andrey
    ;
    Paraschiv, Vasile  
    ;
    Baklanov, Mikhaïl
    ;
    Boullart, Werner  
    Meeting abstract
    2008, American Vacuum Society 55th International Symposium, 19/10/2008
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    TaN metal gate etch mechanisms in BCl3-based plasmas

    Shamiryan, Denis
    ;
    Danila, Andrey
    ;
    Baklanov, Mikhaïl
    ;
    Boullart, Werner  
    Journal article
    2010, Journal of Vacuum Science and Technology A, (28) 2, p.302-305

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