Browsing by Author "Danilkin, Evgeny"
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Publication Effect of quartz window temperature on plasma composition during STI etch
Proceedings paper2008, Micro- and Nanoelectronics 2007, 1/10/2007, p.7.03E+03Publication Influence of the top chamber window temperature on the STI etch process
Proceedings paper2010, China Semiconductor Technology International Conference - CSTIC, 18/03/2010, p.731-736