Browsing by Author "Das, S."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Buried power rails and back-side power grids: ARM CPU power delivery network design beyond 5nm
Proceedings paper2019, IEEE International Electron Devices Meeting - IEDM 2019, 9/12/2019, p.446-449Publication Logic and memory patterning breakthrough using High-NA lithography
Proceedings paper2024, 2024 Conference on Photomask Technology, 2024-09-29, p.1321604