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Browsing by Author "Dauendorffer, A."

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    Litho Process Development for Pillars to Enable High Density 4F2 Memory Cells at 34nm Pitch

    Pak, Murat  
    ;
    Dauendorffer, A.
    ;
    Nafus, K.
    ;
    Das, Arijit  
    ;
    Hasan, Mahmudul  
    ;
    Rincon Delgadillo, Paulina  
    Proceedings paper
    2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275004

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