Browsing by Author "Dauendorffer, A."
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Publication Litho Process Development for Pillars to Enable High Density 4F2 Memory Cells at 34nm Pitch
; ;Dauendorffer, A. ;Nafus, K.; ; Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275004