Browsing by Author "Daviet, Jean-François"
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Publication Clean dry strip process for implanted resist using water vapor plasma
;Daviet, Jean-François ;Coosemans, FrankVertommen, JohanMeeting abstract1994, 186th Electrochemical Society Fall Meeting: Symposium on High Purity Silicon III, 9/10/1994, p.646-647Publication Ion-implanted resist stripping with water vapour
;Daviet, Jean-François ;Coosemans, FrankVertommen, JohanJournal article1994, European Semiconductor, (16) April, p.21-23