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Browsing by Author "Daviet, Jean-François"

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    Clean dry strip process for implanted resist using water vapor plasma

    Daviet, Jean-François
    ;
    Coosemans, Frank
    ;
    Vertommen, Johan
    Meeting abstract
    1994, 186th Electrochemical Society Fall Meeting: Symposium on High Purity Silicon III, 9/10/1994, p.646-647
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    Ion-implanted resist stripping with water vapour

    Daviet, Jean-François
    ;
    Coosemans, Frank
    ;
    Vertommen, Johan
    Journal article
    1994, European Semiconductor, (16) April, p.21-23

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