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Browsing by Author "Dawes, Andy"

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    Tuning, Modelling, and Verifying Effects of Intermixing on EUV Multilayer Mirror Performance via a Combined Simulation and Experimental Approach

    Dorney, Kevin  
    ;
    Nerke, Eva
    ;
    Rook, Katrina
    ;
    Checco, Antonio
    ;
    Krasnov, Vitaly  
    ;
    Nalin Mehta, Ankit  
    Proceedings paper
    2025, Photomask Technology, 2025-09-22, p.136870Z

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