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Browsing by Author "De Boeij, Wim"

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    The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging

    Geh, Bernd
    ;
    Flagello, Donis
    ;
    Progler, Chris
    ;
    Martin, Patrick
    ;
    Leunissen, Peter
    ;
    Hansen, Steve
    Proceedings paper
    2005, 25th Annual BACUS Symposium on Photomask Technology, 3/10/2005, p.599210

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