Browsing by Author "De Boeij, Wim"
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Publication The impact of mask birefringence on hyper-NA (NA>1.0) polarized imaging
;Geh, Bernd ;Flagello, Donis ;Progler, Chris ;Martin, Patrick ;Leunissen, PeterHansen, SteveProceedings paper2005, 25th Annual BACUS Symposium on Photomask Technology, 3/10/2005, p.599210