Browsing by Author "De Geyter, Pascal"
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Publication Analysis of the etch rate limiting steps in dry etching of tungsten in fluorine containing plasmas
Proceedings paper1994, 185th Electrochemical Society Spring Meeting: 10th Symposium on Plasma Processing, 22/05/1994, p.437-448Publication Analysis of the etching mechanisms of tungsten in fluorine containing plasmas
Journal article1995, J. Electrochem. Soc., 142, p.1971-1976