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Browsing by Author "De Poortere, E."

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    Design for manufacturability analysis in dual damascene 28nm-pitch single exposure EUV metal logic designs using voltage contrast

    Blanco, Victor  
    ;
    Cerbu, Dorin  
    ;
    Renaud, Vincent  
    ;
    Van de Kerkhove, Jeroen  
    ;
    Tabery, C.
    ;
    De Poortere, E.
    Proceedings paper
    2026, DTCO and Computational Patterning V, 2026-02-22, p.1398017

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