Browsing by Author "De Smedt, F."
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Publication Determination of photoresist degradation products in O-3/DI processing
Journal article2002, Ozone Science and Engineering, (24) 5, p.391-398Publication The increasing importance of the use of ozone in the microelectronics industry
Journal article2002, Ozone Science and Engineering, (24) 5, p.379-390