Browsing by Author "De Wachter, Jef"
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Publication Apparent and steady-state etch rates in thin film etching and underetching of microstructures. II: Characterisation
;Van Barel, Gregory; ; ;De Wachter, Jef; Witvrouw, AnnJournal article2010, Journal of Micromechanics and Microengineering, (20) 5, p.55034