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Browsing by Author "Dean, K."

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    Recent advancements in 157nm resist performance

    Turnquest, K.
    ;
    Graffenberg, V.
    ;
    Patel, S.
    ;
    Miller, D.
    ;
    Dean, K.
    ;
    Goethals, Mieke
    ;
    Van Roey, F.
    Oral presentation
    2002, 3rd International Symposium on 157nm Lithography

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