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Browsing by Author "Deduytse, Davy"

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    ALD of ZrO2, TiO2 and ZrTiO4 thin films from heteroleptic precursors

    Schaekers, Marc  
    ;
    Opsomer, Karl  
    ;
    Rampelberg, Geert
    ;
    Deduytse, Davy
    ;
    Detavernier, Christophe
    Oral presentation
    2010, 10th International Conference on Atomic Layer Deposition - ALD

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