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Browsing by Author "Degraeve, R."

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    Scaling of Hf-based high-k dielectrics

    Heyns, Marc  
    ;
    Beckx, Stephan  
    ;
    Caymax, Matty  
    ;
    Chen, J.
    ;
    Claes, Martine  
    ;
    Coenegrachts, Bart  
    Meeting abstract
    2004, International Workshop on Dielectric Thin Films for Future ULSI Devices, 26/05/2004, p.5-6

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