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Browsing by Author "Del-Agua-Bomiquel, J.I."

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    Probing doping conformality in fin shaped field effect transistor structures using resistors

    Vandervorst, Wilfried  
    ;
    Jurczak, Gosia  
    ;
    Everaert, Jean-Luc
    ;
    Pawlak, B.J.
    ;
    Duffy, Ray
    Journal article
    2008, Journal of Vacuum Science and Technology B, (26) 1, p.396-401

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