Browsing by Author "Deng, Y."
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Publication Realizing more accurate OPC models by utilizing SEM contours
;Wei, C. ;Sejpal, R. ;Deng, Y. ;Kusnadi, I. ;Fenger, G. ;Oya, M. ;Okamoto, Y. ;Maruyama, K.Yamazaki, Y.Proceedings paper2020, Metrology, Inspection, and Process Control for Microlithography XXXIV, 23/03/2020, p.1132524