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Browsing by Author "Derks, Paul"

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    Impact of acid statistics on EUV local critical dimension uniformity

    Jiang, Jing
    ;
    De Simone, Danilo  
    ;
    Yildirim, Oktay  
    ;
    Meeuwissen, Marieke  
    ;
    Hoefnagels, Rik  
    Proceedings paper
    2017, Extreme Ultraviolet (EUV) Lithography, 27/02/2017, p.1014323

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