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Browsing by Author "Derksen, G.B."

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    Influence of gate patterning on line edge roughness

    Leunissen, Peter
    ;
    Jonckheere, Rik  
    ;
    Ronse, Kurt  
    ;
    Derksen, G.B.
    Journal article
    2003, Journal of Vacuum Science & Technology B, (21) 6, p.3140-3148

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