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Browsing by Author "Derksen, Giljam B."

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    Transfer of line edge roughness during gate patterning processes

    Leunissen, Peter
    ;
    Ercken, Monique  
    ;
    Ronse, Kurt  
    ;
    Derksen, Giljam B.
    Proceedings paper
    2004, Proceedings 26th International Symposium on Dry Process, 30/11/2004, p.1-6

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