Browsing by Author "Dhagat, Parul"
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Publication Benefits of using advanced sub-resolution features for 0.55NA brightfield imaging
Proceedings paper2024, 2024 International Conference on Extreme Ultraviolet Lithography, 2024-09-29Publication Limitation of EUV single exposure on DRAM applications: learning and challenges
Oral presentation2022-06-15, ASML Technology Conference 2022