Browsing by Author "Dhara, Arpan"
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Publication Atomic Layer Deposition of Boron-Containing Layers Using a Combined Trimethylborate- and Water-Based Plasma
Publication Atomic Layer Deposition of Lithium Borate and Lithium Borophosphate for Lithium-Ion Batteries
Journal article2025, CHEMISTRY OF MATERIALS, (37) 2, p.687-696