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Browsing by Author "Dillenbeck, C."

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    Silicon surface roughening by the decomposition of hydrogen peroxide

    Schmidt, Harald
    ;
    Meuris, Marc  
    ;
    Mertens, Paul  
    ;
    Verhaverbeke, Steven
    ;
    Heyns, Marc  
    ;
    Hellemans, L.
    Proceedings paper
    1994, Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 15/10/1993, p.102-110

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