Browsing by Author "Doebereiner, Stefan"
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Publication Implementation of 248nm based CD metrology for advanced reticle production
;Hourd, Andrew ;Grimshaw, Anthony ;Scheuring, Gerd ;Gittinger, ChristianDoebereiner, StefanProceedings paper2003-01, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 13/01/2003, p.148-157