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Browsing by Author "Doebereiner, Stefan"

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    Implementation of 248nm based CD metrology for advanced reticle production

    Hourd, Andrew
    ;
    Grimshaw, Anthony
    ;
    Scheuring, Gerd
    ;
    Gittinger, Christian
    ;
    Doebereiner, Stefan
    Proceedings paper
    2003-01, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 13/01/2003, p.148-157

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