Browsing by Author "Doll, O."
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Publication Advanced single chemistry alkaline cleaning in a STEAG single tank tool
Meeting abstract2001, 200th Meeting of the Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device Manufac, 2/09/2001Publication Advanced single chemistry alkaline cleaning in a STEAG single tank tool
Proceedings paper2002, Cleaning Technology in Semiconductor Device Manufacturing VII, 4/09/2001, p.23-30Publication Single chemistry cleaning solution for advanced wafer cleaning
Proceedings paper2001, Ultra Clean Processing of Silicon Surfaces 2000: Proceedings of the 5th International Conference - UCPSS, 18/09/2000, p.119-122