Browsing by Author "Druzhinina, Tamara"
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Publication Feasibility study of grapho-epitaxy DSA for complementing EUV lithography beyond N10
;Lin, Chenxi ;Zou, Yi ;Ambesi, Davide ;Druzhinina, Tamara ;Wuister, SanderKarageorgos, IoannisProceedings paper2015, 1st International Symposium on DSA, 26/10/2015