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Browsing by Author "Druzhinina, Tamara"

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    Feasibility study of grapho-epitaxy DSA for complementing EUV lithography beyond N10

    Lin, Chenxi
    ;
    Zou, Yi
    ;
    Ambesi, Davide
    ;
    Druzhinina, Tamara
    ;
    Wuister, Sander
    ;
    Karageorgos, Ioannis
    Proceedings paper
    2015, 1st International Symposium on DSA, 26/10/2015

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