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    Development of a new post-etch photoresist stripper for copper BEOL process

    Du, Bing
    ;
    Kneer, Emil
    ;
    Townsend, P.H.
    ;
    Le, Quoc Toan  
    ;
    Hendrickx, Dirk  
    ;
    Vereecke, Guy  
    Proceedings paper
    2007, 24th International VLSI-ULSI Multilevel Interconnection Conference - VMIC, 24/09/2007

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