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Browsing by Author "Durbha, Ganesha"

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    High-NA EUV patterning of logic feature 20-24 nm: An e-beam defectivity analysis

    Mahmud-Ul, Hasan  
    ;
    Durbha, Ganesha
    ;
    Blanco, Victor  
    ;
    Roy, Syamashree  
    ;
    Franke, Joern-Holger  
    Proceedings paper
    2026, Metrology, Inspection, and Process Control XL, 2026-02-22, p.139814B

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