Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Durr, Emma"

Filter results by typing the first few letters
Now showing 1 - 2 of 2
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    A conformal oxide liner for through silicon vias by pulsed SA-CVD deposition

    Sleeckx, Erik  
    ;
    Schaekers, Marc  
    ;
    Durr, Emma
    Proceedings paper
    2009, EuroCVD 17 / CVD 17, 4/10/2009, p.359-666
  • Loading...
    Thumbnail Image
    Publication

    A conformal oxide liner for through silicon vias by pulsed SA-CVD deposition

    Sleeckx, Erik  
    ;
    Schaekers, Marc  
    ;
    Durr, Emma
    Meeting abstract
    2009, 216th ECS Meeting, 4/10/2009, p.2566

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings