Browsing by Author "Durr, Emma"
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Publication A conformal oxide liner for through silicon vias by pulsed SA-CVD deposition
Proceedings paper2009, EuroCVD 17 / CVD 17, 4/10/2009, p.359-666Publication A conformal oxide liner for through silicon vias by pulsed SA-CVD deposition
Meeting abstract2009, 216th ECS Meeting, 4/10/2009, p.2566