Browsing by Author "Dussable, Mathilde"
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Publication An automated method for overlay sample plan optimization based on spatial variation modeling
;Chen, X. ;Preil, M. E. ;Dussable, MathildeMaenhoudt, MireilleProceedings paper2001, Metrology, Inspection, and Process Control for Microlithography XV, 26/02/2001, p.257-267