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Browsing by Author "Edinger, Klaus"

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    EUV mask repair using a combination of focused-electron-beam-induced processing and vacuum Atomic Force Microscopy

    Bret, Tristan
    ;
    Baralia, Gabriel
    ;
    Baur, Christof
    ;
    Budach, Michael
    ;
    Hofmann, Thorsten
    Oral presentation
    2011, 55th International conference on Electron, Ion and Photon Beam Technology and Nanofabrication - EIPBN

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