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Browsing by Author "Efremov, A.M."

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    Mechanisms of film deposition from BCl3-based plasma during dry etching

    Shamiryan, Denis
    ;
    Efremov, A.M.
    ;
    Serlenga, V
    ;
    Baklanov, Mikhaïl
    ;
    Boullart, Werner  
    Meeting abstract
    2009, International Conference Micro- and Nanoelectronics - ICMNE, 5/10/2009, p.Mar-24-Mar-24

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