Browsing by Author "Elsmore, Chris"
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Publication Comparison of HCl gas-phase cleaning with conventional and dilute wet chemistries
Proceedings paper1996, Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 9/10/1995, p.142-149Publication Development of an environmentally-friendly HCl gas-phase clean
Proceedings paper1995, Proceedings IES 41st Annual Technical Meeting, 30/04/1995, p.487-494Publication Generation and transport of corrosion products in HCL gas lines
Journal article1997, Future Fab International, (1) 2, p.283-288Publication Generation and transport of corrosion products in HCl gas lines
Proceedings paper1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.69-72Publication The effect of CF4 contaminant gas on N2O oxidation
Oral presentation1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication U.V. activated cleaning using NO, HCl and NO/HCl
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.125-129