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Browsing by Author "Engelen, J."

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    Fundamental Principles of Phase Shifting Masks by Fourier Optics: Theory and Experimental Verification

    Ronse, Kurt  
    ;
    Op de Beeck, Maaike  
    ;
    Van den hove, Luc  
    ;
    Engelen, J.
    Journal article
    1994, J. Vac. Sci. Technol. B, (12) 2, p.589-600

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