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Browsing by Author "England, Jonathan G."

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    OPC aware mask and wafer metrology

    Maurer, Wilhelm
    ;
    Wiaux, Vincent  
    ;
    Jonckheere, Rik  
    ;
    Philipsen, Vicky  
    ;
    Hoffmann, Thomas
    Proceedings paper
    2002, 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 14/01/2002, p.175-181

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