Browsing by Author "Erdman, Andreas"
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Publication Mask defects in EUV lithography: Understanding
Oral presentation2012, China Semiconductor Technology International Conference at Semicon China - CSTICPublication Modeling strategies for EUV mask multilayer defect dispositioning
Proceedings paper2013, Extreme Ultraviolet (EUV) Lithography IV, 24/02/2013, p.86790YPublication Rigorous modeling and optimization
Oral presentation2012, International Symposium on Extreme Ultraviolet Lithography - EUVL