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Browsing by Author "Eusner, Thor"

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    Controlling scratching in Cu Cchemical-mechanical planarization (CuCMP)

    Eusner, Thor
    ;
    Saka, N.
    ;
    Chun, J-H
    ;
    Armini, Silvia  
    ;
    Moinpour, M.
    ;
    Fisher, P.
    Meeting abstract
    2008, 214th ECS Meeting, 12/10/2008, p.2064

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