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Browsing by Author "Evans, Baiya"

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    Poly- silicon etch with diluted ammonia: Application to replacement gate integration scheme

    Sebaai, Farid  
    ;
    del Agua Borniquel, Jose Ignacio  
    ;
    Vos, Rita  
    ;
    Absil, Philippe  
    ;
    Chiarella, Thomas  
    Oral presentation
    2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS

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