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Browsing by Author "Evanschitsky, Peter"

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    Perspectives and tradeoffs of novel absorber materials for high NA EUV lithography

    Erdmann, Andreas
    ;
    Mesilhy, Hazem
    ;
    Evanschitsky, Peter
    ;
    Philipsen, Vicky  
    ;
    Timmermans, Frank
    Proceedings paper
    2020, Extreme Ultraviolet (EUV) Lithography XI, 23/02/2020, p.1132309

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