Browsing by Author "Fang, Yu"

BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure

Leakage and TDDB Mechanisms in 18 nm Pitch Direct Metal Etch Ru Interconnects with Airgaps

Line-to-Line TDDB Modeling: LER Specs for Sub-20-nm Pitch Interconnects

Local Electric Field-Aware 3D TDDB model for BEOL reliability predictions

Three-Dimensional Modeling of BEOL TDDB: Variability Specs for Sub-20 nm Half-Pitch Interconnects