Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Farrar, Nigel"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Effect of laser bandwidth tuning on line/space and contact printing at 1.35NA

    Van Look, Lieve  
    ;
    Bekaert, Joost  
    ;
    Vandenberghe, Geert  
    ;
    Lalovic, Ivan
    ;
    Farrar, Nigel
    Proceedings paper
    2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings