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    Influence of varying porogen loads and different UV cures on low-k film characteristics

    Farrel, Leo
    ;
    Verdonck, Patrick  
    ;
    Van Besien, Els  
    ;
    Ciofi, Ivan  
    ;
    Borrello, Gianpaolo
    Journal article
    2011, Journal of Nanoscience and Nanotechnology, (11) 9, p.8363-8367

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