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Browsing by Author "Felten, F."

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    Reticle imaging and metrology using a CD-SEM at IMEC

    James, A.
    ;
    Felten, F.
    ;
    Polli, M.
    ;
    England, J.
    ;
    Marschner, Thomas
    ;
    Vandenberghe, Geert  
    Proceedings paper
    2000, 16th European Conferenc on Mask Technology for Integrated Circuits and Microcomponents, p.128-133

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