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Browsing by Author "Feng, M."

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    Separable models for computational lithography

    Liu, Hua-Yu
    ;
    Zhao, Q.
    ;
    Chen, J.F.
    ;
    Jiang, J.
    ;
    Socha, B.
    ;
    Van Setten, E.
    ;
    Engelen, A.
    ;
    Meessen, J.
    Proceedings paper
    2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70280X

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