Browsing by Author "Ferrier, Nicola"
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Publication Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy
Journal article2016, Journal of Applied Crystallography, 49, p.823-834Publication Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94241N