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Browsing by Author "Filatova, E.O."

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    Application of soft X-ray reflectometry for analysis of underlayer influence on structure of atomic-layer deposited SrTixOy films

    Filatova, E.O.
    ;
    Kozhevnikov, I.V.
    ;
    Sokolov, A.A.
    ;
    Konashuk, A.S.
    ;
    Schaefers, F.
    Journal article
    2014, Journal of Electron Spectroscopy and Related Phenomena, 196, p.110-116

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